Product Overview
This ultra-high purity PSA nitrogen generator uses advanced pressure swing adsorption (PSA) technology, combined with a carbon purification system, to produce nitrogen with a purity of more than 99.999%, meeting the strict requirements of high purity nitrogen in the semiconductor and electronics industries. The equipment is compact and efficient, making it an economical and environmentally friendly solution to replace liquid nitrogen gas supply.
core advantage
Ultra high purity:
With a carbon purification system, the purity of nitrogen can reach more than 99.999%, effectively removing impurities such as oxygen, water, and carbon dioxide.High energy efficiency:
PSA technology has low energy consumption, and its operating cost is much lower than that of liquid nitrogen supply. Long-term use saves a lot of costs.Stable and reliable:
The use of high-quality imported core components ensures the stability of long-term continuous operation.Intelligent control:
PLC automatic control system, real-time monitoring of purity, flow and other parameters, easy to operate, support remote monitoring.Flexible customization:
The gas production range is 1-500Nm3/h, which can be customized according to customer needs to meet the production needs of different scales.
application field
Semiconductor manufacturing: An inert protective atmosphere used in wafer cleaning, lithography, packaging, and other processes.
Electronic components production: prevent oxidation and improve product yield.
Photovoltaic industry: protective gases used in the production of solar cells.
Other high-precision industries: such as lithium batteries, powder metallurgy, etc.
Environmental protection and safety
This equipment adopts the principle of physical adsorption, no chemical pollutant emissions, green environmental protection. At the same time, the equipment is equipped with multiple safety protection devices, such as pressure, temperature, purity alarm, to ensure safe operation. Compared with traditional liquid nitrogen transportation, on-site nitrogen production reduces carbon emissions during transportation, in line with the concept of sustainable development.
after-sales services
We provide comprehensive after-sales services, including equipment installation and commissioning, operation training, regular maintenance and 24-hour technical support. In addition, an optional remote diagnostic system can be equipped to quickly respond to customer needs and ensure long-term stable operation of the equipment.






